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ATPremier LITE™ supports bonding up to 200 mm wafers, ceramics, or substrates. Including a 4” dual-ramp chuck option for enhanced throughput.
Highly capable to maintain ± 3.5 µm @ 3 sigma accuracy during placement (200 mm work piece).
Advanced low temperature gold bumping.
Capability to integrate Auto Wafer Handler or EFEM for factory automation.
Easy access to lower console.
Optional copper or silver alloy capability and kits.